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Industrial Cleanroom
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Industrial clean rooms are used for various purposes including production and research in many fields such as semiconductor, precision equipment, food packaging, special printing, etc. and the required cleanliness varies depending on each processing and product features.
As specified in US federal standard, its main purpose is removing dust in the air; especially current semiconductor industry requires very strict condition to maintain dust less than 0.1?.
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Electronic industries including semiconductor, display, etc.
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Optical industries including LED, devices, etc.
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Clean environment for research and testing facilities
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Classification by air current direction
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Item
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Vertical laminar flow
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Horizontal laminar flow
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Turbulent flow
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CLASS
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1~100
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100
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1,000 ~ 10,000
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Installation cost
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High
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Moderate
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Low
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Maintenance cost
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High
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Moderate
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Low
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The number of air changes
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400 times or more/HR
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30~150 times/HR
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30~60/HR
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Application
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All CLEAN ROOM areas
CLEAN BENCH
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Mainly CLEAN BENCH
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CLEAN ROOM
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Clean Room(Vertical Laminar Flow)
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It makes the air current flow from the ceiling to the floor and can create a very clean space with cleanliness less than CLASS 100. Purge speed is 0.25~0.5m/sec.
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- Less air resistance and ventilation resistance.
- Great supply amount of clean air per unit time.
- Reaching high cleanliness within a short
- amount of time.
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- Complicated structure
- Weak against mechanical oscillation
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Clean Room(Horizontal Laminar Flow)
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It makes the air current flow from one side of the wall to the other side of the wall and the cleanliness is low in the lower part of the air current due to the effect of working in the upper current. Less than Class 100 in the upper current and approx Class 1,000 of cleanliness in the lower current depending on the nature of work. Purge speed is 0.45m/sec or higher.
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- Good to store goods of the special parts.
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- Particles are accumulated and fall off as
- being farther away from the ventilation
- part.
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Turbulent flow
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It has HEPA Filter attached to the diffuser of regular air conditioning equipment; it increases cleanliness by diluting indoor contaminant with clean diffuser air. It uses HEPA Filter Box or BFU(Blower Filter Unit) and purges air purified from the air handling unit(AHU) to circulate air flow necessary for keeping cleanliness. Cleanliness is in the range of CLASS 1,000~100,000 and the number of air changes is 20~80 times/hr.
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- Good for improving cleanliness of specific parts
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- Possibility of processing error
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